PHAME
Mark Identification

PHAME

Serial Number

77025946

Filing Date

Oct 20, 2006

Registration Date

Apr 1, 2008

Trademark by

CARL ZEISS MICROSCOPY GMBH

Classification Information

Phase metrology system comprised of a laser, homogenizer, polarizer, an objective, and a camera, used in the semiconductor industry to analyze lithographic photo masks

Electrical and Scientific Apparatus