PERKIN-ELMER

DIGITAL COMPUTERS; MAGNETIC DISK DATA STORAGE UNITS; MAGNETIC TAPE DATA STORAGE UNITS; CRT DISPLAYS; PRERECORDED COMPUTER PROGRAMS; COMPUTER WORK STATIONS COMPRISING A CRT DISPLAY, ELECTRONIC KEYBOARD, MICROPROCESSOR AND HIGH SPEED MONOLITHIC DATA STORAGE CIRCUITS; APPARATUS FOR REMOTE COUPLING OF ONE OR MORE CRT DISPLAYS TO ONE OR MORE DIGITAL COMPUTERS; APPARATUS USED IN THE MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUITS-NAMELY, PROJECTION MASK ALIGNERS; SPUTTERING APPARATUS FOR DEPOSITING MATERIALS ON A SUBSTRATE APPARATUS FOR ETCHING MONOLITHIC ELECTRONIC CIRCUITS; ELECTRON BEAM LITHOGRAPHY APPARATUS; SCANNING CALORIMETERS; SCANNING AUGER SPECTROMETER; ELECTRON SPECTROMETER; HIGH VACUUM SPUTTERING APPARATUS; VACUUM, ION AND SORPTION PUMPS FOR LABORATORY INSTRUMENTS; MICROBALANCES, POLARIMETERS; CHART RECORDERS; LABORATORY INSTRUMENTS FOR THERMAL ANALYSIS, THERMOGRAVIMETER ANALYZERS; MOLECULAR BEAM EPITAXY APPARATUS; GAS CHROMATOGRAPH; LIQUID CHROMATOGRAPH