PDS

Sub-atmospheric pressure gas, namely, gases for manufacturing semiconductors, solar panels, and flat panel displays, not including natural gas; sub-atmospheric pressure gas storage and dispensing systems for gases for manufacturing semiconductors, solar panels, and flat panel displays, comprised of adsorbents with gases for manufacturing semiconductors, solar panels, and flat panel displays adsorbed thereon, not including natural gas or natural gas dehydration or purification machines

Sub-atmospheric pressure gas storage and dispensing systems for gases for manufacturing semiconductors, solar panels, and flat panel displays, comprised of empty metal gas supply containers used for holding adsorbents with gases for manufacturing semiconductors, solar panels, and flat panel displays adsorbed thereon, not including natural gas or natural gas dehydration or purification machines