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Vapor deposition machines for manufacturing solar cells; etching machines for manufacturing solar cells; vapor deposition machines for manufacturing light emitting diode; etching machines for manufacturing light emitting diode; vapor deposition machines for manufacturing organic light emitting diodes; etching machines for manufacturing organic light emitting diodes; vapor deposition machines for manufacturing flat panel displays; etching machines for manufacturing flat panel displays; atomic layer deposition machines for manufacturing solar cells; atomic layer deposition machines for manufacturing light emitting diode; atomic layer deposition machines for manufacturing organic light emitting diodes; atomic layer deposition machines for manufacturing flat panel displays