76371349
Feb 15, 2002
Jan 27, 2004
Capital equipment for the semiconductor manufacturing industry, namely, inspection and test apparatus, namely integrated circuit verification, debug, and failure analysis systems comprised of microscopes, test signal generators, detectors, chip and/or wafer adapters, and computing hardware and operating and analysis software; automated test equipment comprised of microscopes, test signal generators, detectors, chip and/or wafer adapters, and computing hardware and operating and analysis software; backside device imaging units; photon timing systems comprised of microscopes, test signal generators, detectors, chip and/or wafer adapters, and computing hardware and operating and analysis software; temperature mapping systems comprised of microscopes, test signal generators, detectors, chip and/or wafer adapters, and computing hardware and operating and analysis software; and emission detection systems comprised of microscopes, test signal generators, detectors, chip and/or wafer adapters, and computing hardware and operating and analysis software; all of the forgoing for measuring the performance characteristics of semiconductors
Electrical and Scientific Apparatus