OPAL
Mark Identification

OPAL

Serial Number

77076607

Filing Date

Jan 5, 2007

Registration Date

Jul 27, 2010

Trademark by

OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLSLIMITED

Classification Information

Machines for manufacturing semiconductors

Machinery

Apparatus for thin film deposition, including atomic layer deposition, namely, a reaction chamber, an energy source, means for introducing precursor and substrate chemical preparations into the reaction chamber, and sensors for measuring and monitoring deposition growth

Electrical and Scientific Apparatus