76416476
Jun 3, 2002
Oct 7, 2003
Optical metrology apparatus and instrumentation, namely metrology tools for 2D and 3D visualization and measurement of the deformation motion and strain field in advanced electronic packages, system-on-chip and MIEMS/MOEMS (micro-electro-mechanical systems I micro-opto-electromechanical systems) product engineering; computer software used for image acquisition, stressing control, image processing, image correlation, deformation motion analysis, strain testing and strain measurement in the electronic and microsystem manufacturing industries, and parts therefor
Electrical and Scientific Apparatus