78148521
Jul 29, 2002
Jan 18, 2005
Semiconductor wafer processing equipment, operational software, and components, namely-- epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, measuring and monitoring tools, wafer cleaning systems, and chemical mechanical polishers; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
Electrical and Scientific Apparatus