OAI

SEMICONDUCTOR MANUFACTURING MACHINES, NAMELY, OPTICAL EDGE BEAD REMOVAL SYSTEMS USING EITHER A FLOOD EXPOSURE SYSTEM OR A FIBER OPTIC CABLES IN COMBINATION WITH AN EDGE TRACKING HEAD FOR EXPOSING PHOTO RESIST ALONG THE EDGE PORTIONS OF WAFERS; AND DISK DRIVE MEDIA TRANSPORT SYSTEMS COMPOSED OF CONVEYORS AND INDUSTRIAL ROBOTS FOR MOVING THE MEDIA INTO AND OUT OF SEMICONDUCTOR PROCESSING MACHINES

METERS AND PROBES FOR THE MEASUREMENT AND ANALYSIS OF ULTRAVIOLET LIGHT; LASER METERS FOR MEASURING PULSE ENERGY IN PHOTOLITHOGRAPHY STEPPERS OR STEP AND SCAN SYSTEMS IN THE PROCESSING OF SEMICONDUCTORS; AND MASK ALIGNERS FOR ALIGNING SUBSTRATES AND MASKS FOR EXPOSURE TO ULTRAVIOLET LIGHT FOR IN THE PROCESSING OF SEMICONDUCTORS

ULTRAVIOLET LIGHT SOURCES AND COMPONENTS THEREOF, ALL SOLD AS A UNIT FOR USE IN THE PROCESSING OF SEMICONDUCTORS, NAMELY ELECTRIC POWER SUPPLIES, ULTRAVIOLET LIGHTS, SHUTTERS AND TIMERS; FLOOD EXPOSURE SYSTEMS COMPOSED OF LAMPS, REFLECTORS, MIRRORS, SHUTTERS, OPTICAL INTEGRATORS AND COLLIMATING LENSES FOR EXPOSING OBJECTS TO A FIELD OF UNIFORM ULTRAVIOLET LIGHT IN PHOTOLITHOGRAPHIC PROCESSING OF SEMICONDUCTORS