Mark Identification
O3MEGA
Serial Number
78562042
Filing Date
Feb 7, 2005
Registration Date
Aug 21, 2007
Trademark by
Active Trademark
Classification Information
Ozone gas generator and delivery systems comprised primarily of a pump, vaporizer, and power controller, used in the semiconductor and thin film coating markets for photoresist and contaminant removal, cleaning, oxide growth, and surface conditioning
Environmental Control Apparatus