SEMICONDUCTOR PROCESSING TOOLS, NAMELY, ETCHING TOOLS FOR USE IN ETCHING NON-VOLATILE AND LOW VOLATILITY MATERIALS AND FILMS, SUCH AS PLATINUM, IRIDIUM, IRIDIUM OXIDE, BARIUM STRONTIUM TITANATE (BST), STRONTIUM BISMUTH TITANATE (SBT), STRONTIUM TITANATE (STO), RUTHENIUM, RUTHENIUM OXIDE, LEAD ZIRCONIUM TITANATE (PZT), IRON, NICKEL, AND COPPER FILMS, IN THE FORMATION OF SEMICONDUCTOR DEVICES; COMPUTER HARDWARE USED WITH SEMICONDUCTOR PROCESSING TOOLS, AND SOFTWARE USED TO CONTROL THE SEMICONDUCTOR PROCESSING TOOLS
Electrical and Scientific Apparatus