NOVATION

semiconductor wafer processing machines, namely, chemical mechanical planarizers, silicon wafer carriers, silicon wafer loaders, silicon wafer endpoint detectors, silicon wafer grinders, silicon wafer polishers and replacement parts therefor; photonics, optical and telecommunication component processing machines, namely chemical mechanical planarizers, silicon wafer carriers, silicon wafer loaders, silicon wafer endpoint detectors, silicon wafer grinders, silicon wafer polishers and replacement parts therefor; all for the research, failure analysis, processing and production of semiconductor substrates, thin films, silicon discs, silicon wafers, optical components, photonics components and telecommunication components