78133118
Jun 4, 2002
Oct 26, 2004
Semiconductor wafer processing machines, namely, chemical mechanical planarizers, silicon wafer carriers, silicon wafer loaders, silicon wafer endpoint detectors, silicon wafer grinders, silicon wafer polishers and replacement parts therefor; photonics, optical and telecommunication component processing machines, namely, chemical mechanical planarizers,silicon wafer carriers, silicon wafer loaders, silicon wafer endpoint detectors, silicon wafer grinders, silicon wafer polishers and replacement parts therefor; all for the research, failure analysis, processing and production of semiconductor substrates, thin films, silicon discs, silicon wafers, optical components, photonics components and telecommunication components
Machinery