79014667
Apr 15, 2005
Nov 7, 2006
Mechanical machines for use in the semiconductor industry, particularly for the manufacture of semiconductors and for the deposition of thin films; electronically operated machines for the manufacture of semiconductor wafers and for the deposition of thin films; parts for aforesaid goods.
MachineryChemical semiconductor wafer processing equipment, namely thermal treatment reactors, chemical vapor deposition reactors, also operating with electric gas discharge; electronically controlled chemical equipment for the manufacture of semiconductors and for the deposition of thin films; parts for aforesaid goods.
Electrical and Scientific Apparatus