76350390
Dec 18, 2001
MACHINES FOR CLEANING HIGH-TECHNOLOGY MANUFACTURING AND DEVICE SURFACES, NAMELY, SEMICONDUCTOR MANUFACTURING SURFACES, MICROELECTROMECHANICAL SYSTEM (MEMS) MANUFACTURING SURFACES, SENSOR HEADS, SPACE INSTRUMENTATION SURFACES, SATELLITE INSTRUMENTATION SURFACES, SOLAR CELLS, AND ELECTRICAL CONTACT SURFACES, USING HIGH-VELOCITY LIQUID PARTICLE CLUSTERS
MachineryCLEANING OF HIGH-TECHNOLOGY MANUFACTURING AND DEVICE SURFACES, NAMELY SEMICONDUCTOR MANUFACTURING SURFACES, MICROELECTROMECHANICAL SYSTEM (MEMS) MANUFACTURING SURFACES, SENSOR HEADS, SPACE INSTRUMENTATION SURFACES, SATELLITE INSTRUMENTATION SURFACES, SOLAR CELLS, AND ELECTRICAL CONTACT SURFACES
Building Construction and Repair