76599562
Jun 28, 2004
Dec 19, 2006
COATINGS APPLIED TO SUBSTRATES; NAMELY, THIN FILM COATINGS,LUBRICATION COATINGS, WETTING LAYER COATINGS, ANTI-STICTION COATINGS, COUPLING AGENT COATINGS, BONDING AGENT COATINGS, ADHESION LAYER COATINGS, SURFACE MODIFYING COATINGS, MONOLAYER DEPOSITION COATINGS, NANOFILM DEPOSITION COATINGS, AND RELEASE LAYER COATINGS, APPLIED TO SUBSTRATES, NAMELY, SENSORS, ACTUATORS, SWITCHES, RF-MEMS, MICRO-OPTIC DEVICES, NANOIMPRINTS, AND OTHER MICROSTRUCTURES
PaintsPOWER OPERATED VAPOR DEPOSITION COATING MACHINERY, OPTIONALLY INCLUDING SOFTWARE AND COMPUTER-DRIVEN CONTROL SYSTEMS; PLASMA GENERATION MACHINERY FOR TREATING OF SUBSTRATES, NAMELY, SENSORS, ACTUATORS, SWITCHES, RF-MEMS, MICRO-OPTIC DEVICES, NANOIMPRINTS, AND OTHER MICROSTRUCTURES; AND, VACUUM GENERATION MACHINERY FOR USE IN COMBINATION WITH VAPOR DEPOSITION COATING MACHINERY
MachineryMATERIALS TREATMENT EMPLOYING VAPOR DEPOSITION TECHNIQUES FOR THE APPLICATION OF VAPOR DEPOSITION COATINGS TO SENSORS, ACTUATORS, SWITCHES, RF-MEMS, MICRO-OPTIC DEVICES, NANOIMPRINTS, AND OTHER MICROSTRUCTURES; AND VAPOR DEPOSITION COATING SERVICES FOR THE APPLICATION OF VAPOR DEPOSITION COATINGS TO SENSORS, ACTUATORS, SWITCHES, RF-MEMS, MICRO-OPTIC DEVICES, NANOIMPRINTS, AND OTHER MICROSTRUCTURES
Treatment of Materials