MTI

SEMICONDUCTOR WAFER PROCESSING MACHINES AND SYSTEMS THEREFROM, NAMELY, MACHINE FOR CLEANING SEMICONDUCTOR WAFERS AND MASKS; MACHINE FOR COATING AND/OR DEVELOPING SEMICONDUCTOR WAFERS AND/OR MASKS; MACHINE FOR DOWNSTREAM STRIPPING PHOTORESIST FROM SEMICONDUCTOR WAFERS AND/OR CHEMICAL VAPOR DEPOSITION; MACHINE FOR PROCESSING SEMICONDUCTOR WAFERS HAVING MULTIPLE PROCESS ZONES, A SEMICONDUCTOR WAFER HANDLING MACHINE AND A PROGRAMMABLE ELECTRONIC CONTROLLER SOLD AS A UNIT; AND SUBUNITS THEREOF, NAMELY, COATING UNIT FOR APPLYING A PRIME COATING TO SEMICONDUCTOR WAFERS; SELF-CONTAINED UNIT FOR PROVIDING POWER CONNECTIONS, FLUIDIC CONNECTIONS VACUUM CONNECTIONS, AND EXHAUST AND AIR CONNECTION TO SEMICONDUCTOR WAFER PROCESSING MACHINES; AND MEASURED FLUID DISPENSING UNIT FOR DISPENSING FLUIDS IN SEMICONDUCTOR WAFER PROCESSING MACHINES