Classification Information
Optical inspection apparatus for semi-conductor materials and elements; semiconductor photomask phase-shift measuring apparatus; semiconductor photomask transmittance measuring apparatus; apparatus and instruments for measuring semiconductor photomask phase shifting amounts; semi-conductor testing machines and instruments; electron microscopes; optical semiconductor defect detectors; testing apparatus not for medical purposes, namely, semiconductor testing apparatus; precision measuring apparatus for measuring defects in semiconductor photomasks
Electrical and Scientific Apparatus