Machines for manufacturing semiconductors, including parts and fittings therefor; semiconductor manufacturing machines and systems, and parts and fittings therefore; machines for the manufacturing and treatment of semiconductor wafers, including parts and fittings therefor; industrial chemical reactors
MachineryElectrical reactors for processing semiconductor wafers; robots being electronic control devices; electronically controlled apparatus for the semiconductor industry; parts and fittings for the aforementioned goods
Electrical and Scientific Apparatus