MODU TRACK

Mechanical apparatus for the manufacturing of substrates, namely semiconductor substrates, silicon chips, wafers, and glass and ceramic substrates; and parts thereof; machines for wet-chemical and dry treatment of substrates, namely semiconductor substrates, silicon chips, wafers, glass and ceramic substrates; and parts thereof; fully automatic apparatus and equipments comprised thereof for cleaning lacquering, developing, etching and stripping substrates, baking, drying and treatment by IN, visible, or IR light irradiation of substrates, namely semiconductor substrates, silicon chips, wafers, glass and ceramic substrates, and parts thereof; semiautomatic apparatus, namely manual insertion and removal apparatus for cleaning, lacquering, developing, etching and stripping substrates, baking, drying and treatment by IN, visible, or IR light irradiation of substrates, namely semiconductor substrates, silicon chips, wafers, photo masks, glass and ceramic substrates, and parts thereof

Installation, maintenance, repair, process adjustment and optimization of mechanical apparatus for the manufacturing of substrates, namely semiconductor substrates, silicon chips, wafers, photomasks, glass and ceramic substrates, and parts thereof; installation, maintenance, repair, process adjustment and optimization of machines for wet-chemical and dry treatment, and semiautomatic apparatus, and manual insertion and removal apparatus for cleaning, lacquering, developing, etching, stripping, baking, drying and treatment by UV, visible, or IR light radiation of substrates at the customers location