MKS
Mark Identification

MKS

Serial Number

78911394

Filing Date

Jun 19, 2006

Registration Date

Apr 17, 2007

Trademark by

MKS INSTRUMENTS INC.

Active Trademark

Classification Information

Sensors, electrical instrumentation, gauges, switches and meters for measurement and control of fluid pressure, vacuum and gas flow; residual gas analyzers; monitors for detecting gas compositions within a process chamber; mass spectrometers; electrical analog-digital interface adapters; computer hardware used for measurement and control of fluid pressure, vacuum and gas flow; radio frequency, direct current and microwave power supplies and generators; power generators for converting energy from chemical gas reactions; gas and fluid pressure valves, flanges and fittings for controlling, containing, isolating and shutting off gas and fluid flow; gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; electronic gas filters and purifiers; heaters; helium leak detectors; gas detectors and analyzers; calibration equipment for monitoring and adjusting gas and fluid pressure and flow; traps for capturing waste materials exiting from a process chamber; liquid delivery system composed primarily of a pump, vaporizer, and controller for vaporizing a liquid into a gas and delivering the gas to a process chamber; software for operating mass spectrometers; computer hardware and software for determining the presence and measurement of residual contaminants; micro-processor based data communication devices for communicating between quadrapole gas or fluid mass analyzers for and a computer; devices used to generate radio waves and microwave plasma; reactive gas generators including remote plasma sources and ozone generators; controllers, computer hardware and software for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection, analysis, and delivery devices; radio frequency amplifiers and radio frequency power generators; DC power generators; and user manuals and guides sold as a unit therewith

Electrical and Scientific Apparatus