73150575
Dec 2, 1977
Mar 13, 1979
LINE WIDTH MEASURING SYSTEM COMPRISING A TELEVISION MONITOR AND CONTROL UNIT, MICROSCOPE MOUNTED TELEVISION CAMERA, MICROSCOPE STAGE (OPTIONAL MOTORIZED STAGE), AND SENORS FOR MEASURING LINE AND GAP WIDTHS ON INTEGRATED CIRCUIT PHOTOMASKS TO MICROINCH ACCURACY AND RESOLUTION
Electrical and Scientific Apparatus