79060594
Sep 8, 2008
Jul 28, 2009
Monitoring apparatus for monitoring degree of vacuum, gas volume, gas pressure and gas concentration, monitoring controllers in the nature of electric controller for monitors that monitor degree of vacuum, gas volume, gas pressure and gas concentration, sensor units for measuring degree of vacuum, gas volume, gas pressure and gas concentration, electric controller units and radio frequency (RF) generators for measurement of degree of vacuum, gas volume, gas pressure and gas concentration; measuring or analyzing machines and instruments, namely, residual gas measuring apparatus for measuring degree of vacuum, gas volume, gas pressure and gas concentration; gas measuring apparatus for measuring degree of vacuum, gas volume, gas pressure and gas concentration; gas detector for detecting the presence of gas; residual gas detectors for detecting the presence of residual gas; gas analyzer; mass spectrometers; residual gas analyzers; quadrupole mass spectrometers
Electrical and Scientific Apparatus