METALLINER

Machinery and parts thereof for coating articles by means of physical vapour deposition, chemical vapour deposition including atomic layer deposition or a combination of physical vapour deposition and chemical vapour deposition; arc coating machines and parts therefor; vacuum generation pumps; sputtering machines and parts therefor, magnetron sputtering machines and parts therefor, namely, sputtering sources, magnetron sputtering sources, targets of metal and/or ceramics, being cathodes, for magnetron sputtering sources; machine parts, namely, arc sources and targets of metal and/or ceramics, being cathodes, for arc sources; vacuum treatment chambers for carrying out physical vapour deposition and chemical vapour deposition