MERCURY

installation and maintenance of equipment, machines, apparatus and instruments, and systems composed thereof, for the processing and production of semiconductor devices, thin films on semiconductor substrates or substrates, semiconductor discs and wafers, namely, machines for manufacturing solar cells, and/or for drying, annealing and/or regeneration of solar cells

equipment, machines, apparatus and instruments, and systems composed thereof, for the processing and production of semiconductor devices, thin films on semiconductor substrates or substrates, semiconductor discs and wafers, namely, machines for manufacturing solar cells, and machines for drying, annealing and/or regeneration of solar cells

software, downloadable software and computer systems for execution thereof, firmware, computer operating systems, recorded computer operating programs, and user interfaces for controlling, monitoring, and diagnosing the operations of, and the processes in, machines, apparatus and instruments, and systems composed thereof, for manufacturing semiconductor devices, thin films on semiconductor substrates or substrates, semiconductor discs and wafers, namely, machines for manufacturing solar cells, and/or for drying, annealing and/or regeneration of solar cells