Mark Identification

MEGAFLOW

Serial Number

78124935

Filing Date

Apr 29, 2002

Registration Date

Nov 18, 2003

Trademark by

KINETICS CHEMPURE SYSTEMS INC.

Classification Information

bulk slurry blending and delivery systems for the semiconductor industry comprising of a slurry mix and distribution module, slurry feed and distribution network and control and supervisory module which displays and performs data acquisition and tracking of critical process parameters in real time

Electrical and Scientific Apparatus