MECRALD

Machines and machine tools for atomic scale layer deposition, in particular chemical deposition machines for chemical processing, not for research use and chemical and plasma etching machines; machines, namely, atomic scale layer deposition apparatus, in particular chemical deposition machines for chemical processing, not for research use and chemical and plasma etching machines

Data processing equipment; computers and computer programmes for atomic scale layer deposition apparatus

Treatment and coating of materials in the nature of applying coatings by atomic scale layer deposition method, in particular, by chemical deposition and etching of components for integrated circuits and optics with chemicals and/or plasma, and consulting connected thereto