75656066
Mar 8, 1999
Mar 6, 2001
Active Trademark
RECIRCULATING FLUID CHILLERS FOR USE IN INDUSTRIAL APPLICATIONS, NAMELY WITH LASERS, PLASMA ETCHERS, DIFFUSION PUMPS, GRAPHITE FURNACES, REACTION VESSELS, SPUTTERING EQUIPMENT, VACUUM SYSTEMS, ELECTRON MICROSCOPES AND POWER SUPPLIES
Environmental Control Apparatus