MACH

instruments for testing, inspecting, and characterizing physical properties of semiconductor wafers, integrated circuits, and reticles; computer hardware and software used for testing, inspecting, and characterizing physical properties of semiconductor wafers, integrated circuits, and reticles; computer hardware and software used for monitoring and controlling semiconductor wafer, integrated circuit, and reticle manufacturing processes; computer hardware and software used for providing feedback about device parameters used in the manufacturing of semiconductor wafers, integrated circuits, and reticles