LITHOSCOUT

Measuring apparatus and instruments, namely, traps for obtaining a sample of a gas-phase contaminant from a gas; gas filtering systems consisting primarily of instruments and apparatus for obtaining a sample of gas-phase contaminants from a gas, and gas monitoring systems consisting primarily of instruments and apparatus for determining gas-phase contaminants in a gas, all for use in connection with the gas industry, namely, for the determination of gas purity within semi-conductor processing systems and semi-conductor processing tools