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Computer hardware and computer software, namely, computer servers having stored computer software for providing comparative data for use in the evaluation, inspection, review and metrology of wafers, reticles, and flat panel displays manufactured by semiconductor fabrication machines, computer terminals that access the comparative data service made available by a computer server, and software running on computer servers and terminals for providing comparative data for use in the evaluation, inspection, review and metrology of wafers, reticles, and flat panel displays manufactured by semiconductor fabrication machines