76156818
Oct 31, 2000
Dec 17, 2002
chemical compositions, in liquid or gaseous form for cleaning and etching a semiconductor substrate
Chemicalssemiconductor wafer processing equipment, namely, automatic wafer processing, wafer drying machines, wafer cleaning machines, wafer etching machines and wafer heating machines
Electrical and Scientific ApparatusRESEARCH AND DEVELOPMENT OF NEW PRODUCTS AND PROCESSES FOR OTHERS AND TECHNICAL CONSULTING AND RESEARCH IN THE FIELDS OF CHEMICAL AND MICROELECTRONICS
Computer and Scientific