LEYSPEC

Vacuum pumps; controllers in the nature of regulators for driving devices being parts of vacuum pumps

mass spectrometers; automatic control apparatus, namely, control valves for regulating the flow of gases in vacuum pumps, electronic controls for regulating vacuum pump motors, cooling circuits and purge circuits, and electronic controls for controlling external vacuum apparatus including mass spectrometers and chamber pressure control; programmable controllers, namely, electronic controls for regulating motors; sensors for measuring instruments, namely, sensors for mass measuring spectrometers; computer software for monitoring residual gas analyzer; sensory software for sensing the functioning of residual gas analyzers