76110009
Aug 15, 2000
Semi-conductor manufacturing apparatus, namely, electron beam exposure system comprising machines for use in semiconductor, integrated circuit, electronics and miro-machine industries, electron beam lithography system comprising machines for use in semiconductor, integrated circuit, electronics and miro-machine industries, photo mask manufacturing machines
MachineryElectronic machines/instruments, namely electron beam exposure system comprising devices for use in semiconductor, integrated circuit, electronics and miro-machine industries, electron beam lithography system comprising machines for use in semiconductor, integrated circuit, electronics and miro-machine industries, measuring apparatus/instruments, namely, precision measuring machines and instruments, namely, photo mask inspection machines
Electrical and Scientific Apparatus