77533083
Jul 28, 2008
Jun 29, 2010
Machines and machine tools for making solar cells and solar panels; power operated substrate lubrication apparatus; sputtering machines and apparatus therefor; thin film deposition machines and apparatus therefor; machinery, namely, enhanced plasma deposition equipment; machinery, namely, thermal treatment equipment used in the manufacture of solar cells; machinery, namely, etch equipment; machinery, namely, solar panels handling equipment; vacuum chambers assemblies and subassemblies for all the aforesaid goods
Machinery