78152192
Aug 8, 2002
Aug 3, 2004
Optical apparatus and instruments, namely, machine tools for optical lithography; apparatus and instruments for producing defined structures on substrates, namely, machine tools for optical lithography on photosensitive layers or resists on masks or substrates
MachineryElectrical controllers for use with machine tools for optical lithography
Electrical and Scientific Apparatus[Manufacture of structures on photosensitive layers or resist on masks or substrates to the order and/or specification of others]
Treatment of Materials[Technical consultation in the field of providing defined structures on substrates, namely, optical lithography on photosensitive layers or resists on masks or substrates; technical consultation in the field of optical process technology, namely, optical lithography processes]
Computer and Scientific