79058654
Mar 25, 2008
Jul 28, 2009
Effluent gas treatment equipment in the nature of electric air deodorizers for industrial use; effluent gas treatment equipment in the nature of organic solvent adsorption devices for organic solvent recovery system exclusively used for chemical processing apparatus; effluent gas treatment equipment in the nature of dehumidifiers for industrial use; effluent gas treatment equipment in the nature of sterilizers for industrial use; effluent gas treatment equipment in the nature of hazardous and toxic gases thermal decomposition devices, in the nature of effluent gas filtering devices, and in the nature of effluent gas wet scrubbing devices, all for semiconductor manufacturing equipment
Environmental Control Apparatus