74449183
Oct 21, 1993
Sep 17, 1996
machines for deposition of thin layers of various materials, namely ultra high vacuum chambers for the manufacture of thin films of semiconductors, ultra high vacuum chambers for the manufacture of thin films of superconductors, and ultra high vacuum chambers for the manufacture of thin films of ferromagnetic material; vacuum chambers, vacuum pumps and vacuum pumping machines
Machineryscientific and analytical instruments, namely spectrophotometers, spectrographs, monochromators, diffraction gratings, holographic diffraction gratings, microspectrophotometers, spectrographic imagers and parts therefor, surface analysis instruments for analyzing microscopic surface characteristics, ellipsometers, ultra high vacuum thin film deposition apparatus, evaporative deposition apparatus, apparatus for molecular beam epitaxy, apparatus for laser ablation epitaxy, gas analysis testers and mechanical property testers
Electrical and Scientific Apparatus