73438623
Aug 10, 1983
Feb 26, 1985
Electrical and Scientific Equipment-Namely, Ionization Source Apparatus, Ion Source Controls, Ion Source Enclosure Apparatus, Plasma Bridge Neutralizers which Create a Conductive Path Between the Ion Beam and Electron Emitting Filament Wires, Hollow Cathodes Comprising Electron Emitter and Apparatus for Holding a Workpiece in the Beam of the Source
Electrical and Scientific Apparatus