76554503
Oct 27, 2003
Nov 28, 2006
Thin-film electronics having therein a matrix-like array of devices, namely, actuators, sensors,monitors, MEMS, antenna pixels, boundary layer controllers, shape controllers, disturbance compensators, power distribution, power controllers, optics, switches, relays, and processors; adaptive optics, namely, mirrors and light receptors having thereon thin-film electronics with matrix-like array of devices to control the shape thereof
Electrical and Scientific Apparatus