75587906
Nov 13, 1998
Mar 11, 2003
Laboratory unit comprising one or more pieces of laboratory equipment, computer hardware, computer software and instruction manuals all sold as a unit for installation and use within an integrated circuit fabrication facility for sampling, testing, measuring, and altering integrated circuits and their manufacturing processes, and for reporting, transmitting in electronic form, and organizing information produced by the laboratory unit; and parts therefor
Electrical and Scientific Apparatus