76272143
Jun 16, 2001
Sep 10, 2002
Vacuum-based thin film deposition systems for coating substrates, namely sputtering, magnetron sputtering, ion beam sputtering, flash evaporator, thermal evaporator, chemical vapor, plasma enhanced chemical vapor, physical vapor, hot filament chemical vapor, metalorganic chemical vapor, vacuum metallizer, reactive ion etching, laser ablation
Electrical and Scientific Apparatus