75449947
Mar 13, 1998
Oct 10, 2000
Machines for use in the production of semiconductors comprised of one or more of the following, cabinets for housing pumps, metering dispensers, source switching units and computer controllers for dispensing chemicals, all used as part of an automated system for monitoring and controlling automated dispensing of chemicals during semiconductor fabrication
MachinerySoftware for monitoring and controlling equipment used in dispensing chemicals during semiconductor fabrication processes
Electrical and Scientific Apparatus