77251682
Aug 9, 2007
Aug 12, 2008
Active Trademark
Electrical mass flow controllers comprising flow meters and valves; mass flow meters; electrical liquid source controllers; electronic devices for supplying liquid to liquid source vaporization control systems; pressure regulator for fluids; electronic valves for controlling fluids; electrical exhaust controllers; precision film flow meters; electronic controllers used to check power source, power voltage, signal, display unit, setting unit, cables, and other parts of mass flow controllers, flow meter or valves; infrared ray gas concentration monitors; residual gas analyzer; vacuum gauge used to measure gas pressure
Electrical and Scientific ApparatusLiquid vaporizer for mixing liquid and gases; gas purifying installations; direct injection liquid source vaporizer
Environmental Control Apparatus