HIGH ACCURACY INSPECSTEP INTERFEROMETER (HA-ISI)
Mark Identification

HIGH ACCURACY INSPECSTEP INTERFEROMETER (HA-ISI)

Serial Number

76597005

Filing Date

Jun 14, 2004

Registration Date

Jul 4, 2006

Trademark by

LITEL INSTRUMENTS

Classification Information

Interferometer and software package for analyzing semiconductor chip optical test structure data received from an overlay tool, sold as a unit

Electrical and Scientific Apparatus