HIGH ACCURACY IN-SITU INTERFEROMETER (HA-ISI)
Mark Identification

HIGH ACCURACY IN-SITU INTERFEROMETER (HA-ISI)

Serial Number

76587118

Filing Date

Apr 14, 2004

Registration Date

Jul 4, 2006

Trademark by

LITEL INSTRUMENTS

Classification Information

Interferometer and software package for analyzing numerical bar-in-bar offset or shift data received from an overlay tool sold as a unit

Electrical and Scientific Apparatus