Computer software; computer hardware and software for the collection of data; computer hardware for remotely accessing and transmitting data; computer software for monitoring system status and supply of vacuum-related data, exhaust reduction, chemical use and gas use, related to the manufacture of semiconductors and integrated circuits; computer software for design and configuration of gas, chemical, vacuum and exhaust management systems, including data on inlet pressure, engine speed, power consumption, oil temperature, discharge temperature or inlet pressure; computer software for remotely accessing and controlling a computer system; computer software for monitoring status, operation, function, environment, failures and errors of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; computer software for recording and display of data relating to status, operation, function, environment, failures and/or errors of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; computer software for the configuration of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps, and controllers therefor; computer software for updating firmware for monitoring status, operation, function, environment, failures and errors of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; computer software for designing and configuring gas, chemical, vacuum and exhaust management systems; computer software for use in controlling vacuum pump systems and keypad/displays for vacuum pump systems; computer interface software; computer software for data integration; intelligent gateways for data processing; user interface software user interface display; configurable interface, configurable user interface; programmable controls; programmable controllers; programmable control apparatus; programmable displays; data processing equipment and computers; data transmitters; data collection apparatus; real-time data processing apparatus; software for real-time data processing and visualisation; software and hardware for remote access, monitoring, communication and analysis; software and algorithms for function, configuration, performance optimisation and programmed tasked operation of pumps, singular and multiple pumps, vacuum pumps and vacuum systems; computer software for optimising operation and configuration installations of singular and multiple pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; hardware and software for use in diagnostic and support services for manufacturing processes; electrical controls, electric control devices for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; electric and electronic controllers for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; electrical controlling devices for pumps, vacuum pumps; electrical controlling devices for ion vacuum pumps; electrical controlling devices for getter pumps, namely, titanium sublimation vacuum pumps; electronic controllers for vacuum pump systems; wireless controllers to remotely monitor and control the function and status of other electrical, electronic, and mechanical devices or systems; electronic monitors, display monitors; information display terminals; displays for control devices and controllers for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; remote controls, remote control apparatus, remote control receivers, remote control transmitters; industrial controllers, industrial controllers for vacuum pumps; power controllers, electronic power controllers, power controllers for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; pump controllers, vacuum pump controllers, ion pump controllers, getter pump controllers, neg pump controllers, titanium sublimation pump controllers
Electrical and Scientific Apparatus