76637188
Apr 27, 2005
Aug 15, 2006
IDENTIFY EQUIPMENT, NAMELY ELLIPSOMETER BASED APPARATUS FOR MEASURING THICKNESS AND OPTICAL PROPERTIES OF SEMICONDUCTOR, DISK DRIVE, MAGNETIC DATA STORAGE MEDIA, OPTICAL DATA STORAGE MEDIA, THIN FILMS AND MULTIPLE LAYER FILMS ON SUBSTRATES AND COATINGS, INCLUDING TEMPERATURE CAUSED EFFECTS, AND COMPUTER PROGRAMS NECESSARY FOR CONTROLLING THE ELLIPSOMETER BASED APPARATUS AND FOR ANALYZING ACQUIRED ELLIPSOMETRIC DATA
Electrical and Scientific Apparatus