78620282
Apr 29, 2005
adsorbed gas provided in gas supply container holding solid adsorbent material for use in the manufacture of semiconductors and for use in other chemical and industrial processes; solid adsorbent materials, namely, carbons, for use in the manufacture of semiconductors and for use in other chemical and industrial processes; gas supply containers containing solid adsorbent material in which adsorbed gas is stored and from which gas is desorbed for dispensing from the container
Chemicals