76325657
Oct 16, 2001
Mar 21, 2006
Barrier vacuum deposition system comprised of a single vacuum chamber or sequential vacuum chambers designed to deposit multi-layer thin film coatings composed of polymer layers and ceramic layers, one or more chambers including a UV or electron beam curing station for the curing of monomer into polymer, a load lock or load lock(s) to allow for transfer of the material to be coated to the multi-layer thin film barrier coating deposition equipment, and computerized process control equipment to monitor and control the multi-layer thin film and associated processes
Machinery